AUTOMATED CALIBRATING SYSTEM OF MASS-FLOW CONTROLLER

The auto-calibration system calibrates a mass flow system automatically. The system includes a computer(12) for generating set point signal for controlling liquid flow, and for displaying flow command and actual liquid flow detected by a flow sensor, a D/A converter(15) for converting set point sign...

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Bibliographic Details
Main Authors LEE, JAE - JIN, OH, SUNG - HYO, SO, BYONG - JU, PAENG, JAE - WON
Format Patent
LanguageEnglish
Korean
Published 10.07.1995
Edition6
Subjects
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
PHYSICS
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Summary:The auto-calibration system calibrates a mass flow system automatically. The system includes a computer(12) for generating set point signal for controlling liquid flow, and for displaying flow command and actual liquid flow detected by a flow sensor, a D/A converter(15) for converting set point signal to analog signal and for transmitting the analog signal to a mass-flow controller(17) and a calibrator(10), a sample and hold circuit(31)for adjusting gain of the D/A converter(15), a sample and latch circuit(27) for latching output signals of the sample and hold circuit(31) and the computer(12), and an A/D converter(16) for converting analog mass-flow signal detected by the mass flow meter to digital signal.
Bibliography:Application Number: KR19910024223