FILD EMISSION DEVICE AND MANUFACTURING METHOD THEREOF

The field emission device and its fabrication method are suggested which are able to lower the threhold voltage at the gate electrode. The tip of the field emitter is shaped like a cone in order to inhance the field applied to the tip. The main structure of the device consists of the first insulatio...

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Bibliographic Details
Main Authors CHOE, SON - KYONG, LEE, KANG - OK, LEE, CHON - KYU
Format Patent
LanguageEnglish
Korean
Published 17.04.1995
Edition6
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:The field emission device and its fabrication method are suggested which are able to lower the threhold voltage at the gate electrode. The tip of the field emitter is shaped like a cone in order to inhance the field applied to the tip. The main structure of the device consists of the first insulation layer on the substrate, the cone-type emitter electrode formed over the insulation layer, and the gate electrode self-aligned with the emitter electrode. For the fabrication of the cone-type emitter, the photo-lithography to form the shadow area by the patterned photoresist and the over-etched second insulation layer is required.
Bibliography:Application Number: KR19920021333