SEMICONDUCTOR DEVICE WITH A HIGH CAPACITANCE CAPACITOR AND FABRICATING METHOD THEREOF
The semiconductor device includes a conductive structure formed on the semiconductor substrate, a first electrode portion having an insulating film, an conductive silicon layer grown through the pinholes of the insulating film on the conductive structure, a second electrode portion formed on the fir...
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Main Authors | , , |
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Format | Patent |
Language | English Korean |
Published |
26.12.1994
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Edition | 5 |
Subjects | |
Online Access | Get full text |
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Summary: | The semiconductor device includes a conductive structure formed on the semiconductor substrate, a first electrode portion having an insulating film, an conductive silicon layer grown through the pinholes of the insulating film on the conductive structure, a second electrode portion formed on the first electrode portion, and a dielectric film formed between the first and second electrode portions. The method increases the capacitance of the capacitor. |
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Bibliography: | Application Number: KR19910023473 |