ION-SOURCE DEVICE

PURPOSE:To have evaporation of a greater quantity of substance as electrically dissociated from the surface by bombarding a dissociate plate of porous metal with electrons generated between electrodes. CONSTITUTION:Substance to be ionized 12, for ex. Cs, in a vapor generating surface 11 heated by a...

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Bibliographic Details
Main Author YOSHIDA, YOSHIKATSU
Format Patent
LanguageEnglish
Korean
Published 06.10.1994
Edition5
Subjects
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Summary:PURPOSE:To have evaporation of a greater quantity of substance as electrically dissociated from the surface by bombarding a dissociate plate of porous metal with electrons generated between electrodes. CONSTITUTION:Substance to be ionized 12, for ex. Cs, in a vapor generating surface 11 heated by a heater 13 is evaporated and introduced to a cup 19. When this Cs vapor passes through a porous dissociate plate 20 heated by the heater 13, the substance is ionized by surface dissociation. Because this dissociate plate 20 is made of porous material having a large work function, no less than 50% of those atoms which have passed through the plate 20 are dissociated to become pos. ions. The ionized substance is drawn out of the surface of the plate 20 by a convergence electrode 24 and cast off in the form of an ion beam.
Bibliography:Application Number: KR19910006123