APPARATUS FOR BLOCKING WILD CURRENT IN A FLOW CONTROL SYSTEM
The device for maintaining the amount of gas flow in a vacuum chamber, controls gas flows in layers entering the chamber to remove turbulence and contamination of wafers. The device having a flow control valve (3) connected with passage (30A), a flow detecting section (1), an output pneumatic valve...
Saved in:
| Main Authors | , , , , |
|---|---|
| Format | Patent |
| Language | English |
| Published |
24.06.1993
|
| Edition | 5 |
| Subjects | |
| Online Access | Get full text |
Cover
Loading…
| Abstract | The device for maintaining the amount of gas flow in a vacuum chamber, controls gas flows in layers entering the chamber to remove turbulence and contamination of wafers. The device having a flow control valve (3) connected with passage (30A), a flow detecting section (1), an output pneumatic valve (8) actuated by control signals from pneumatic valve, a comparing section (2) for opening/closing the valve (3) by detecting signal of the section (1), comprises input pneumatic valve (6) connected with gas input/output passages (30F,30A) and a controlling section (7) for controlling the valve (6), the section (2), the valve (8). |
|---|---|
| AbstractList | The device for maintaining the amount of gas flow in a vacuum chamber, controls gas flows in layers entering the chamber to remove turbulence and contamination of wafers. The device having a flow control valve (3) connected with passage (30A), a flow detecting section (1), an output pneumatic valve (8) actuated by control signals from pneumatic valve, a comparing section (2) for opening/closing the valve (3) by detecting signal of the section (1), comprises input pneumatic valve (6) connected with gas input/output passages (30F,30A) and a controlling section (7) for controlling the valve (6), the section (2), the valve (8). |
| Author | LEE, CHONG - DAE PAENG, JAE - WON PARK, SONG - DONG JONG, O - JANG SONG, NO - YONG |
| Author_xml | – fullname: SONG, NO - YONG – fullname: PAENG, JAE - WON – fullname: JONG, O - JANG – fullname: PARK, SONG - DONG – fullname: LEE, CHONG - DAE |
| BookMark | eNrjYmDJy89L5WSwcQwIcAxyDAkNVnDzD1Jw8vF39vb0c1cI9_RxUXAODQpy9QtR8PRTcFRw8_EPV3D29wsJ8vdRCI4MDnH15WFgTUvMKU7lhdLcDMpuriHOHrqpBfnxqcUFicmpeakl8d5BlsYGBgam5oYGTk6GxsSpAgC9HyxB |
| ContentType | Patent |
| DBID | EVB |
| DatabaseName | esp@cenet |
| DatabaseTitleList | |
| Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Medicine Chemistry Sciences Physics |
| Edition | 5 |
| ExternalDocumentID | KR930005710BB1 |
| GroupedDBID | EVB |
| ID | FETCH-epo_espacenet_KR930005710BB13 |
| IEDL.DBID | EVB |
| IngestDate | Fri Jul 19 16:10:43 EDT 2024 |
| IsOpenAccess | true |
| IsPeerReviewed | false |
| IsScholarly | false |
| Language | English |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-epo_espacenet_KR930005710BB13 |
| Notes | Application Number: KR19900017790 |
| OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19930624&DB=EPODOC&CC=KR&NR=930005710B1 |
| ParticipantIDs | epo_espacenet_KR930005710BB1 |
| PublicationCentury | 1900 |
| PublicationDate | 19930624 |
| PublicationDateYYYYMMDD | 1993-06-24 |
| PublicationDate_xml | – month: 06 year: 1993 text: 19930624 day: 24 |
| PublicationDecade | 1990 |
| PublicationYear | 1993 |
| RelatedCompanies | HYUNDAI ELECTRONICS CO., LTD |
| RelatedCompanies_xml | – name: HYUNDAI ELECTRONICS CO., LTD |
| Score | 2.4192207 |
| Snippet | The device for maintaining the amount of gas flow in a vacuum chamber, controls gas flows in layers entering the chamber to remove turbulence and contamination... |
| SourceID | epo |
| SourceType | Open Access Repository |
| SubjectTerms | CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES |
| Title | APPARATUS FOR BLOCKING WILD CURRENT IN A FLOW CONTROL SYSTEM |
| URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19930624&DB=EPODOC&locale=&CC=KR&NR=930005710B1 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LS8NAEB5Kfd60Kj6qLCi5BZvmUQsGSTaJ1bZJ2KZaTyWPDYiQFhvx7ztZW-up1xkYdhdmZ76d-WYBbrjawTw8y2VdUbmsJbEuJ3edFKGKLpicXMkrNvLQN3pj7XmiT2rwseLCiDmh32I4InpUiv5eivt6vn7EckRv5eI2eUfR7MGLTEfKlnQxTIDbmuTYphsGTkAlSs0-k3xmoqbiXSotG6HSVpVHV4P23Re7oqXM_8cU7wC2QzRXlIdQ40UD9ujq67UG7A6XFe8G7IgWzXSBwqUbLo7g3gpDi1nReEQQxBF7EFBE4Y8E0bhD6Jgx14_Ik08s4g2CV0IDP2LBgIzeRpE7PIZrz41oT8YFTf-2P-2z9eJtRT2BejEr-CmQPI3zlLfyjGtV-U1POirn3TzT4rZidGPjDJqbLJ1vVl_A_m9znyG3tSbUy88vfokBuEyuxMH9AI_Lg7E |
| link.rule.ids | 230,309,786,891,25594,76906 |
| linkProvider | European Patent Office |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1ZS8NAEB6KV33TqnhUXVDyFmyay4JBkk1ia3ORplqfSo4NiJAWG_HvO4mt9amvMzDsLszOfDvzzQLcMlHFPDzLeVkQGS8lscwn92qKUEWumZxMyCs2susp_bH0PJEnDfhYcWHqOaHf9XBE9KgU_b2s7-v5-hHLrHsrF3fJO4pmj3akmVy2pIthAtyVONPQrMA3fcpRqg1Dzgs11FS8S6FjIFTaVqvxvFXu9GJUtJT5_5hiH8BOgOaK8hAarGhBk66-XmvBnruseLdgt27RTBcoXLrh4gge9CDQQz0ajwiCOGI4PkUU_kQQjZuEjsPQ8iIy8IhObMd_JdT3otB3yOhtFFnuMdzYVkT7PC5o-rf96TBcL94QxBPYKmYFOwWSp3Gesk6eMakqv8mJKjLWyzMp7gpKL1bOoL3J0vlm9TU0-5HrTJ2BN7yA_d9GP4XvSm3YKj-_2CUG4zK5qg_xB-BZhp4 |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=APPARATUS+FOR+BLOCKING+WILD+CURRENT+IN+A+FLOW+CONTROL+SYSTEM&rft.inventor=SONG%2C+NO+-+YONG&rft.inventor=PAENG%2C+JAE+-+WON&rft.inventor=JONG%2C+O+-+JANG&rft.inventor=PARK%2C+SONG+-+DONG&rft.inventor=LEE%2C+CHONG+-+DAE&rft.date=1993-06-24&rft.externalDBID=B1&rft.externalDocID=KR930005710BB1 |