APPARATUS FOR BLOCKING WILD CURRENT IN A FLOW CONTROL SYSTEM

The device for maintaining the amount of gas flow in a vacuum chamber, controls gas flows in layers entering the chamber to remove turbulence and contamination of wafers. The device having a flow control valve (3) connected with passage (30A), a flow detecting section (1), an output pneumatic valve...

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Bibliographic Details
Main Authors SONG, NO - YONG, PAENG, JAE - WON, JONG, O - JANG, PARK, SONG - DONG, LEE, CHONG - DAE
Format Patent
LanguageEnglish
Published 24.06.1993
Edition5
Subjects
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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Summary:The device for maintaining the amount of gas flow in a vacuum chamber, controls gas flows in layers entering the chamber to remove turbulence and contamination of wafers. The device having a flow control valve (3) connected with passage (30A), a flow detecting section (1), an output pneumatic valve (8) actuated by control signals from pneumatic valve, a comparing section (2) for opening/closing the valve (3) by detecting signal of the section (1), comprises input pneumatic valve (6) connected with gas input/output passages (30F,30A) and a controlling section (7) for controlling the valve (6), the section (2), the valve (8).
Bibliography:Application Number: KR19900017790