정전 척 부재, 및 정전 척 장치

• Main Authors: MORISHITA NORITO, OISHI KENTA, MIURA YUKIO, MAETA SHINICHI
• Format: Patent
• Language: Korean
• Published: 10.09.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

시료를 탑재하는 재치면과 재치면의 반대 측에 위치하는 하면을 갖고, 재치면과 하면의 사이에 위치하며, 재치면을 따라 뻗는 전극층과, 전극층으로부터 하면 측으로 뻗는 기둥상의 급전부를 구비하는, 판상의 기체와, 급전부의 단면에 접속되는 단자 부재를 구비하고, 급전부의 외경은, 2mm 이상이며, 급전부와 단자 부재는, 브레이징부에 있어서 브레이징 접속되고, 브레이징부는, 기체의 하면과 전극층의 사이의 1/2의 위치보다 하면 측에 위치하는, 정전 척 부재. This electrostatic chuck member comprises: a plate-shaped substrate that has a placement surface on which a sample is mounted and a lower surface positioned on the reverse side from the placement surface, and that is provided with an electrode layer that is positioned between the placement surface and the lower surface and extends along the placement surface, and a columnar power supply unit that extends from the electrode layer to the lower surface side; and a terminal member that is connected to an end surface of the power supply unit. The outer diameter of the power supply unit is 2 mm or greater. The power supply unit and the terminal member are connected by brazing at a brazed section, and the brazed section is positioned further to the lower surface side than the halfway position between the lower surface of the substrate and the electrode layer.