가고정용 조성물, 가고정용 접착제 및 박형 웨이퍼의 제조 방법

• Main Authors: YAMAMOTO SHOTA, KURIMURA HIROYUKI, TAKAHASHI YUSUKE, TANIGAWA HOSHINO TAKAKO
• Format: Patent
• Language: Korean
• Published: 27.08.2024
• Subjects: ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; ADHESIVES; CHEMISTRY; COMPOSITIONS BASED THEREON; DYES; MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS; METALLURGY; MISCELLANEOUS APPLICATIONS OF MATERIALS; MISCELLANEOUS COMPOSITIONS; NATURAL RESINS; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ORGANIC MACROMOLECULAR COMPOUNDS; PAINTS; POLISHES; THEIR PREPARATION OR CHEMICAL WORKING-UP; USE OF INORGANIC OR NON-MACROMOLECULAR ORGANIC SUBSTANCES ASCOMPOUNDING INGREDIENTS; USE OF MATERIALS AS ADHESIVES

본 발명은 저출력에서의 레이저 조사로도 박리성이 우수한 가고정용 조성물을 제공한다. 가고정용 조성물은 (A) (메타)아크릴레이트를 포함한 중합성 성분; (B) 광래디칼 중합 개시제; (C) 중합성 관능기를 가진 자외선 흡수제를 함유하고, 이하의 순서에 의해 측정되는 아웃가스량이 0.75% 이상인 것을 특징으로 한다. 미리 질량(A0)을 측정한 둥근 판유리 위에 50mm×50mm×0.07mm의 가고정용 조성물을 성형하고, 질소 분위기하에서 파장 365nm의 블랙라이트에 의해 조도 100mW/cm2, 조사 시간 50초, 적산 광량 5000mJ/cm2의 조건에서 경화시켜 시험편을 얻는다. 해당 시험편의 질량(A1)을 측정한 후, 355nm UV레이저(출력: 6W, 스폿 직경: 200μm, 조사 피치: 200μm, 스캔 속도: 8m/sec, 주파수: 40Hz)를 조사하여, 조사 후의 시험편의 질량(A2)을 측정한다. 이러한 순서로 얻어진 질량 및 하기 식으로부터 아웃가스 발생량을 산출한다. 아웃가스 발생량(%)=((A1-A2)/(A1-A0))×100 The present invention provides a composition for temporary fixation having exceptional detachability even under irradiation with a low-power laser. This composition for temporary fixation is characterized by containing (A) a polymerizable component containing a (meth)acrylate, (B) a photoradical polymerization initiator, and (C) an ultraviolet absorber having a polymerizable functional group, and is moreover characterized in that the amount of outgassing measured using the following procedure is 0.75% or greater.　A composition for temporary fixation measuring 50 mm×50 mm×0.07 mm is molded on a circular glass sheet, the mass (A0) of which is measured in advance. The composition is cured using a black light having a wavelength of 365 nm in a nitrogen atmosphere at an illuminance of 100 mW/cm2, an irradiation time of 50 seconds, and a cumulative light amount of 5000 mJ/cm2, and a test piece is obtained. After the mass (A1) of the test piece is measured, the test piece is irradiated with a 355-nm UV laser (output power: 6 W, spot diameter: 200 μm, irradiation pitch: 200 μm, scan speed: 8 m/sec, frequency: 40 Hz), and the mass (A2) of the irradiated test piece is measured. The outgassing amount is calculated using the masses obtained using this procedure and the following formula.　(Outgassing amount (%))=((A1−A2)/(A1−A0))×100