MASK AND MANUFACTURING METHOD THEREOF

• Main Authors: KO JUNGWOO, LEE BYOUNGIL, LEE SEUNGJIN, AHN HONG KYUN, JANG TAEKYONG
• Format: Patent
• Language: English; Korean
• Published: 04.07.2024
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

마스크는 개구부가 정의된 마스크 프레임, 평면 상에서 봤을 때, 상기 개구부 내에 배치되는 제1 개구부가 정의되고, 상기 마스크 프레임 상에 배치된 오픈 마스크, 상기 오픈 마스크 상에서 배치되고, 상기 제1 개구부보다 작은 제2 개구부가 정의된 셀 마스크를 포함할 수 있다. A mask includes a mask frame having an opening, an open mask disposed on the mask frame, the open mask having a first opening, the first opening disposed in the opening in the case that it is viewed in a plan view, and a cell mask disposed on the open mask and having a second opening, the second opening being smaller than the first opening.