SHOWER HEAD ASSEMBLY AND FILM FORMING APPARATUS

• Main Authors: KAKEGAWA TAKASHI, SORITA YUTA, KAWASAKI HIROO
• Format: Patent
• Language: English; Korean
• Published: 19.06.2024
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25; NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

성막과 에칭을 교대로 반복해서 행하는 성막 장치에 있어서, 성막과 에칭에 있어서의 기판 처리의 면내 균일성을 양립시킨다. 성막과 에칭을 교대로 반복해서 행하여, 기판에 형성된 오목부에 금속막을 성막하는 성막 장치에 배치되는 샤워 헤드 어셈블리로서, 원호상의 제1 슬릿이 형성된 제1 플레이트와, 원호상의 제2 슬릿이 형성된 제2 플레이트로서, 상기 제1 플레이트의 하방에서 상하로 상기 제1 플레이트에 중첩해서 배치되고, 상기 제2 슬릿이 상면에서 보아 상기 제1 슬릿과 겹치지 않는 위치에 형성된 상기 제2 플레이트를 갖는 샤워 헤드 어셈블리가 제공된다. A shower head assembly, which is disposed in a film forming apparatus that alternately repeats film formation and etching to form a metal film in a recess formed in a substrate, includes: a first plate having arc-shaped first slits formed in the first plate; and a second plate having arc-shaped second slits formed in the second plate, wherein the second plate is disposed below the first plate to vertically overlap with the first plate, and the second slits are formed at locations such that the second slits do not overlap with the first slits in a plan view.