APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT ABOSTORPTION AND OPERATING METHOD THEREOF

• Main Authors: BANG JEONG MIN, JANG SUNG HO, OH SE JIN, PI JONG HUN, LEE YEONG KWANG, NAM SANG KI, SUNG DOUG YONG, KANG SUNG GIL
• Format: Patent
• Language: English; Korean
• Published: 21.05.2024
• Subjects: BASIC ELECTRIC ELEMENTS; COLORIMETRY; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; PHYSICS; RADIATION PYROMETRY; TESTING

본 발명에 따른 광흡수 기반 라디칼 공간 밀도 분포 측정 장치는, 공정 챔버, 상기 공정 챔버 내부에서 무빙 웰의 이동을 제어하는 무빙 웰 제어장치, 광을 발생하는 광원, 상기 공정 챔버의 뷰포트에 배치되고, 상기 광원으로부터 수신된 광을 상기 무빙 웰로 입사 시키고, 상기 무빙 웰에서 반사된 광을 수신하는 시준기, 및 상기 시준기로부터 상기 반사된 광을 수신하고, 라디칼의 공간 밀도를 측정하기 위하여 상기 수신된 광의 스펙트럼의 흡수량을 분석하는 분광기를 포함할 수 있다. Provided is an apparatus configured to measure radical spatial density distribution including a process chamber including a viewport, a driving device configured to move a moving wall inside the process chamber, a light source configured to generate light, a collimator disposed in the viewport of the process chamber and configured to transmit light received from the light source to the moving wall and receive light reflected from the moving wall, and a spectrometer configured to receive the reflected light from the collimator, and measure radical spatial density based on analyzing an absorption amount of a spectrum of the received light.