DEPOSITION APPARATUS

• Main Authors: MOON JAE SUK, KANG MIN GOO, RYU SUK HA, KO JUN HYEUK, KIM EUI GYU, SONG MIN CHUL, CHO YOUNG SUN
• Format: Patent
• Language: English; Korean
• Published: 28.02.2024
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

본 발명의 증착 장치는, 마스크 상에 배치되는 베이스 기판에 증착 물질을 증착하는 증착 장치에서, 개구를 포함하며 개구를 둘러싸는 마스크 프레임 및 마스크 프레임 상에 배치되는 마스크를 포함하는 마스크 어셈블리, 베이스 기판 상에 배치되는 정전척, 및 정전척 상에 배치되는 플레이트를 포함한다. 정전척은 복수의 자성체들을 포함하며, 복수의 자성체들 중 일부 자성체의 자기적 성질은 복수의 자성체들 중 나머지 자성체의 자기적 성질과 상이하다. A deposition apparatus for depositing a deposition material on a base substrate disposed on a mask, includes: a mask assembly including a mask frame which defines an opening therein and surrounds the opening, and the mask disposed on the mask frame; an electrostatic chuck disposed on the base substrate; and a plate disposed on the electrostatic chuck. The electrostatic chuck includes a plurality of magnetic bodies, and a magnetic property of at least one magnetic body among the plurality of magnetic bodies is different from a magnetic property of remaining magnetic bodies except for the at least one magnetic body among the plurality of magnetic bodies.