Novel molybdenum compound manufacturing method thereof and manufacturing method of a molybdenum-containing thin film comprising the same

• Main Authors: LIM JIN MOOK, HAN MI JEONG, LEE KANG YONG, KIM YOUNG JIN, SONG HAN SANG
• Format: Patent
• Language: English; Korean
• Published: 29.01.2024
• Subjects: ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; ORGANIC CHEMISTRY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

본 발명은 몰리브덴 화합물, 이의 제조방법 및 이를 포함하는 몰리브덴 함유 박막의 제조방법에 관한 것으로, 상기 신규 몰리브덴 화합물은 우수한 열적 안정성 및 증기압 특성을 나타내어 이를 이용한 박막은 균일하고 우수한 전기적 특성을 나타낼 수 있다. Provided are a molybdenum compound, a method of producing the same, and a method of producing a molybdenum-containing thin film including the compound, and since the novel molybdenum compound shows excellent thermal stability and vapor pressure properties, a thin film using the same may show uniform and excellent electrical properties.