고온 샤워헤드의 제조

• Main Authors: AGARWAL SUMIT, WOO KATHERINE, RAMALINGAM CHIDAMBARA A, JAFARI SHAWYON, LI JIAN
• Format: Patent
• Language: Korean
• Published: 18.12.2023
• Subjects: ALLOYS; APPARATUS THEREFOR; BASIC ELECTRIC ELEMENTS; CASTING; CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES; CHEMICAL SURFACE TREATMENT; CHEMISTRY; CLADDING OR PLATING BY SOLDERING OR WELDING; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROFORMING; ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; FERROUS OR NON-FERROUS ALLOYS; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; METALLURGY; PERFORMING OPERATIONS; POWDER METALLURGY; PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS; SEMICONDUCTOR DEVICES; SOLDERING OR UNSOLDERING; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING; TREATMENT OF ALLOYS OR NON-FERROUS METALS; WELDING; WORKING BY LASER BEAM

예시적인 반도체 프로세싱 챔버 샤워헤드들은 내부 코어 영역을 포함한다. 내부 코어 영역은 복수의 구멍들을 정의할 수 있다. 샤워헤드들은 내부 코어 영역의 외주부 주위에 배치된 외부 코어 영역을 포함할 수 있다. 외부 코어 영역은 환형 채널을 정의할 수 있다. 샤워헤드들은 환형 채널 내에 배치된 가열 요소를 포함할 수 있다. 샤워헤드들은 외부 코어 영역의 외주부 주위에 배치된 환형 라이너를 포함할 수 있다. 내부 코어 영역 및 외부 코어 영역은 알루미늄 합금을 포함할 수 있다. 환형 라이너는 알루미늄 합금보다 낮은 열전도도를 가질 수 있다. Methods of manufacturing a semiconductor processing chamber showerheads may include forming a melted aluminum alloy composition, cooling the melted aluminum alloy composition at a rate of at least 103 K/sec to form solid aluminum alloy particles, and forming a core region of a showerhead from the solid aluminum alloy particles. The core region of the showerhead may include an inner core region and an outer core region that may be coupled together. The inner core region may define a plurality of apertures. The outer core region may define a channel that receives a heating element. The methods may include coating the core region with one of aluminum or aluminum oxide and joining a peripheral edge of the outer core region with an inner edge of a metallic annular liner. The metallic annular liner may have a lower thermal conductivity than the core region of the showerhead.