몰리브덴의 증착

• Main Authors: MAHENDERKAR NAVEEN KUMAR, THOMBARE SHRUTI VIVEK, VAN CLEEMPUT PATRICK A, SCHLOSS LAWRENCE
• Format: Patent
• Language: Korean
• Published: 18.12.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

몰리브덴 (Mo) 막들을 증착하는 방법들이 본 명세서에 제공된다. 방법들은 몰리브덴 옥사이드, 몰리브덴 나이트라이드, 또는 몰리브덴 옥시나이트라이드와 같은 몰리브덴 (Mo)-함유 막의 박층을 증착하는 단계를 수반한다. 이어서 Mo-함유 막은 원소 Mo 막으로 변환된다. 이어서 벌크 Mo 막이 원소 Mo 막 상에 증착될 수도 있다. 일부 실시 예들에서, 프로세스는 상대적으로 저온들에서 수행된다. Provided herein are methods of depositing molybdenum (Mo) films. The methods involve depositing a thin layer of a molybdenum (Mo)-containing film such a molybdenum oxide, a molybdenum nitride, or a molybdenum oxynitride. The Mo-containing film is then converted to an elemental Mo film. A bulk Mo film may then be deposited on the elemental Mo film. In some embodiments, the process is performed at relatively low temperatures.