기판 상에 단결정층을 생성하는 시스템 및 방법

• Main Authors: ALASSAAD KASSEM, DONG LIN, EKMAN JOHAN PETER
• Format: Patent
• Language: Korean
• Published: 07.11.2023
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; CRYSTAL GROWTH; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL

기판(20) 상에 에피택셜 단결정층을 생성하기 위한 시스템(100)은, 소스 재료(10) 및 기판(20)을 수용하기 위한 캐비티(5)를 한정하는 내부 용기(30); 내부에 내부 용기(30)를 수용하도록 배치된 절연 용기(50); 내부에 졀연 용기(50) 및 내부 용기(30)를 수용하도록 배치된 외부 용기(60); 및 외부 용기(60) 외부에 배치되고 캐비티(5)를 가열하도록 구성된 가열 수단(70)을 포함하며, 내부 용기(30)는 고체 모놀리식 소스 재료(10) 위의 미리 결정된 거리에 기판(20)을 지지하도록 배치된 복수의 스페이서 엘리먼트(320)를 포함하고, 각 스페이서 엘리먼트(320)는 베이스부(321) 및 상단부(322)를 포함하며, 상단부(322)의 적어도 일부는 기판(20)과 접촉하도록 배치된 정점(323)을 향해 테이퍼링되어 있다. 대응하는 방법이 또한 개시된다. A system (100) for producing an epitaxial monocrystalline layer on a substrate (20) comprising: an inner container (30) defining a cavity (5) for accommodating a source material (10) and the substrate (20); an insulation container (50) arranged to accommodate the inner container (30) therein; an outer container (60) arranged to accommodate the insulation container (50) and the inner container (30) therein; and heating means (70) arranged outside the outer container (60) and configured to heat the cavity (5), wherein the inner container (30) comprises a plurality of spacer elements (320) arranged to support the substrate (20) at a predetermined distance above a solid monolithic source material (10), wherein each spacer element (320) comprises a base portion (321) and a top portion (322), wherein at least part of the top portion (322) tapers towards an apex (323) arranged to contact the substrate (20). A corresponding method is also disclosed.