PR Nozzle having a double pipe structure and PRPhoto-Resist dispenser and spin coater comprising the same nozzle

• Main Authors: CHOI BYOUNG DOO, SON YOUNG JUN
• Format: Patent
• Language: English; Korean
• Published: 10.10.2023
• Subjects: APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; APPARATUS SPECIALLY ADAPTED THEREFOR; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; ATOMISING APPARATUS; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; NOZZLES; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES; SPRAYING APPARATUS; SPRAYING OR ATOMISING IN GENERAL; TRANSPORTING

The technical idea of the present invention is to provide a nozzle having a double pipe structure, and a photoresist (PR) dispenser and a spin coater comprising the nozzle, wherein the nozzle enables multi-suck-back without the driving of a nozzle arm, and an RRC operation and a rinsing operation of a nozzle tip without the movement of the nozzle arm. The nozzle comprises: an internal pipe which is a cone shape with a tip becoming narrower as the same goes downwardly, has a PR transferred and discharges the PR through a tip; and an external pipe which is a cone shape covering the internal pipe and having a tip becoming narrower as the same goes downwardly, has a thinner transferred, and discharges the thinner through the tip. The nozzle is coupled with the nozzle arm to move, and multi-suck-back is performed without the driving of the nozzle arm. 본 발명의 기술적 사상은, 노즐 암의 구동없이 멀티-석-백이 가능하고, 또한, 노즐 암의 이동없이 RRC 동작과 노즐 팁의 린스 동작이 가능한 이중 배관 구조의 노즐, 및 그 노즐을 구비한 PR 디스펜서와 스핀 코터를 제공한다. 그 노즐은 하방으로 가늘어지는 원뿔 형태이고, 포토레지스트(Photo-Resist: PR)가 이송되며, 상기 PR이 팁(tip)을 통해 토출되는 내부 배관; 및 상기 내부 배관을 둘러싸고, 상기 하방으로 가늘어지는 원뿔 형태이며, 희석제(thinner)가 이송되며, 상기 희석제가 팁을 통해 토출되는 외부 배관;을 포함하고, 노즐 암(nozzle arm)에 결합되어 이동하되, 상기 노즐 암의 구동없이 멀티-석-백(multi-suck-back)이 수행된다.