Unit for supplying liquid and apparatus for treating substrate using the same
A liquid supply unit according to one embodiment of the present invention is a liquid supply unit which supplies processing liquid to a substrate. The liquid supply unit includes: a processing liquid nozzle which discharges the processing liquid onto the substrate; and an optical detection portion f...
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| Main Authors | , |
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| Format | Patent |
| Language | English Korean |
| Published |
10.10.2023
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| Subjects | |
| Online Access | Get full text |
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| Abstract | A liquid supply unit according to one embodiment of the present invention is a liquid supply unit which supplies processing liquid to a substrate. The liquid supply unit includes: a processing liquid nozzle which discharges the processing liquid onto the substrate; and an optical detection portion for detecting the behavior of the processing liquid within the processing liquid nozzle using light. At least a part of the processing liquid nozzle has a convex shape.
본 발명의 일 실시예에 따른 액 공급 유닛은 기판에 처리액을 공급하는 액 공급 유닛으로서, 기판 상으로 처리액을 토출하는 처리액 노즐; 및 상기 처리액 노즐 내 처리액의 거동을 광을 이용하여 감지하기 위한 광학 감지부; 를 포함하되, 상기 처리액 노즐의 적어도 일부 영역은 볼록한 형상을 가진다. |
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| AbstractList | A liquid supply unit according to one embodiment of the present invention is a liquid supply unit which supplies processing liquid to a substrate. The liquid supply unit includes: a processing liquid nozzle which discharges the processing liquid onto the substrate; and an optical detection portion for detecting the behavior of the processing liquid within the processing liquid nozzle using light. At least a part of the processing liquid nozzle has a convex shape.
본 발명의 일 실시예에 따른 액 공급 유닛은 기판에 처리액을 공급하는 액 공급 유닛으로서, 기판 상으로 처리액을 토출하는 처리액 노즐; 및 상기 처리액 노즐 내 처리액의 거동을 광을 이용하여 감지하기 위한 광학 감지부; 를 포함하되, 상기 처리액 노즐의 적어도 일부 영역은 볼록한 형상을 가진다. |
| Author | SON YOUNG JUN CHOI BYOUNG DOO |
| Author_xml | – fullname: CHOI BYOUNG DOO – fullname: SON YOUNG JUN |
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| Discipline | Medicine Chemistry Sciences Physics |
| DocumentTitleAlternate | 액 공급 유닛 및 이를 포함하는 기판 처리 장치 |
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| Notes | Application Number: KR20220039653 |
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| RelatedCompanies | SEMES CO., LTD |
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| Snippet | A liquid supply unit according to one embodiment of the present invention is a liquid supply unit which supplies processing liquid to a substrate. The liquid... |
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| SubjectTerms | APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING NOZZLES PERFORMING OPERATIONS PHYSICS SEMICONDUCTOR DEVICES SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL TESTING TRANSPORTING |
| Title | Unit for supplying liquid and apparatus for treating substrate using the same |
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