ETCHANT

• Main Authors: YOON YOUNG JIN, HUH JONG MOO, LEE EUN WON, YANG SHIN HYUK, CHO HYEON SU, PARK JI HUN, KIM BEOM SOO, KANG DONG HAN, KIM JEE HOON
• Format: Patent
• Language: English; Korean
• Published: 05.10.2023
• Subjects: ADHESIVES; CHEMISTRY; DYES; MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE; METALLURGY; MISCELLANEOUS APPLICATIONS OF MATERIALS; MISCELLANEOUS COMPOSITIONS; NATURAL RESINS; PAINTS; POLISHES

과황산염; 함불소 화합물; 함염소 화합물; 고리형 아민 화합물; 무기산; 제1화합물; 및 물;을 포함하고, 상기 제1화합물은 술폰기, 술폰산기, 또는 이의 조합; 및 아민기; 함유 화합물이고, 계면 침투 억제 지수(Y)가 0.10 이상 및 0.35 이하를 만족하고, 상기 계면 침투 억제 지수(Y)는 하기 <식 1>에 의하여 계산된 값인, 식각액 조성물에 관한 것이다: <식 1> Y = 1.4×10-4×M(X1) + 1.3×10-4×M(X2) + 1.45×10-3×M(X3) + 1.5×10-5×M(X1)×M(X2) + 1.6×10-3×M(X1)×M(X3) + 6.5×10-4×M(X2)×M(X3) 상기 식 1에 대한 설명은 본 명세서에 기재된 바를 참조한다. An etchant including: persulfate; a fluorine-containing compound; a chlorine-containing compound; a cyclic amine compound; an inorganic acid; a first compound; and water, wherein the first compound is a compound containing: a sulfonic group, a sulfonic acid group, or a combination thereof; and an amine group, and an interfacial permeation inhibition index (Y) of the etchant is a value of at least about 0.10 and not more than about 0.35, the interfacial permeation inhibition index (Y) being a value calculated by Equation 1:Y=1.4×10−4×M(X1)+1.3×10−4×M(X2)+1.45×10−3×M(X3)+1.5×10−5×M(X1)×M(X2)+1.6×10−3M(X1)×M(X3)+6.5×10−4×M(X2)×M(X3)  Equation 1The description of Equation 1 is as in the specification.