LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD

• Main Authors: OGIWARA TAKAFUMI, KOREMATSU KATSUHIRO
• Format: Patent
• Language: English; Korean
• Published: 05.09.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; SOLDERING OR UNSOLDERING; TRANSPORTING; WELDING; WORKING BY LASER BEAM

An image transfer part transfers an image of a laser light from a spatial light modulator onto an entrance pupil plane of a light condensing part. An optical detector detects reflected light of the laser light incident on an object from a first surface side and reflected by a second surface. A control part controls the spatial light modulator to correct spherical aberrations and generating coma aberrations in a second direction in the entrance pupil plane when reflected light is detected by the light detector so as to check whether a center position of the image of the laser beam projected on the entrance pupil plane corresponds to a center position of the entrance pupil plane in a first direction. Thus, the present invention can easily and accurately check whether the center position of the laser beam transmitted on the entrance pupil plane of the light condensing part matches the center position of the entrance pupil plane of the light condensing part in a predetermined direction. 전상부는 공간 광 변조기에 있어서의 레이저광의 상을 집광부의 입사동면에 전상한다. 광 검출기는 제1 면측으로부터 대상물에 입사하여 제2 면에서 반사된 레이저광의 반사광을 검출한다. 제어부는, 입사동면에 전상된 레이저광의 상의 중심 위치가 제1 방향에 있어서 입사동면의 중심 위치에 일치하고 있는지 여부를 확인하기 위해서, 광 검출기에 의해서 반사광이 검출될 때에, 구면 수차가 보정되도록 그리고 입사동면에 있어서 제2 방향으로 코마 수차가 발생하도록, 공간 광 변조기를 제어한다.