SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

• Main Authors: SASAKI KEISUKE, SAITO YUKIYOSHI, TANAKA KOJI, HIRASE KEITA
• Format: Patent
• Language: English; Korean
• Published: 29.08.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Provided is a technology capable of improving productivity of a substrate processing system. According to one aspect of the present disclosure, a substrate processing system includes: a carry-in/carry-out unit in which a cassette for accommodating a plurality of substrates is carried in/out; an arra...