Semiconductor device

The present invention relates to a semiconductor element. More specifically, the semiconductor element includes: a substrate including an overlay key area; and a plurality of key patterns on the overlay key area. The key patterns include a first key pattern and second to seventh key patterns arrange...

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Bibliographic Details
Main Authors KIM SANGJIN, PARK SUNGSIK, KIM JONGSU, KIM YIGWON, PARK YOUNGSIK, JUE HYEKYOUNG, KIM JEONGHYUN, LEE JINSEONG
Format Patent
LanguageEnglish
Korean
Published 22.08.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:The present invention relates to a semiconductor element. More specifically, the semiconductor element includes: a substrate including an overlay key area; and a plurality of key patterns on the overlay key area. The key patterns include a first key pattern and second to seventh key patterns arranged clockwise surrounding the first key pattern. A hexagon connecting the center points of the second to seventh key patterns is defined. 본 발명은 반도체 소자에 관한 것으로, 보다 상세하게는, 오버레이 키 영역을 포함하는 기판; 및 상기 오버레이 키 영역 상의 복수개의 키 패턴들을 포함한다. 상기 키 패턴들은, 제1 키 패턴 및 상기 제1 키 패턴을 둘러싸며 시계 방향으로 배열된 제2 내지 제7 키 패턴들을 포함하고, 상기 제2 내지 제7 키 패턴들의 중심점들을 연결하는 육각형이 정의된다.
Bibliography:Application Number: KR20220019534