ROBOT HAND

• Main Author: NAKATSUKA ATSUSHI
• Format: Patent
• Language: English; Korean
• Published: 16.06.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HAND TOOLS; MANIPULATORS; PERFORMING OPERATIONS; PORTABLE POWER-DRIVEN TOOLS; SEMICONDUCTOR DEVICES; TRANSPORTING

An objective of the present invention is to enable an entry by suctioning and holding a robot hand such that the robot hand does not crack a wafer, even when a distance between racks of a cassette is short. To achieve the objective, a robot hand (6), wherein the plate-shaped robot hand (6) is mounted on a robot (1) with a suction hole (62) provided on an adsorption surface (60) to suction and hold a convex spherical surface of a wafer (90) curved in a dome shape, includes: a mounting part (61) disposed at a rear end to be mounted on the robot (1); and a first suction part (64) and a second suction part (65), formed into two parts at the front end of the robot hand (6) with the suction hole (62) disposed therein to suction the wafer (90), wherein the first suction part (64) and the second suction part (65) have a plurality of slits (640, 650) formed alternately to be bendable like a finger along the convex spherical surface of the wafer (90). (과제) 카세트의 선반과 선반의 거리가 작아도, 로봇 핸드가 웨이퍼를 균열하지 않도록 흡인 유지하여 출입 가능하게 한다. (해결 수단) 로봇(1)에 장착하고, 돔 형상으로 만곡된 웨이퍼(90)의 볼록 구면을 흡인 유지하는 흡인구(62)를 흡착면(60)에 구비한 판형의 로봇 핸드(6)로서, 후단에 배치되어 로봇(1)에 장착하는 장착부(61)와, 로봇 핸드(6)의 선단 측이 되어 두 갈래가 되도록 형성되고 웨이퍼(90)를 흡인하는 흡인구(62)를 배치한 제1 흡인부(64), 및 제2 흡인부(65)를 구비하고, 제1 흡인부(64)와 제2 흡인부(65)는, 웨이퍼(90)의 볼록 구면을 따라 손가락과 같이 굴곡 가능하게 복수의 슬릿(640)(슬릿(650)) 이 교대로 형성된 로봇 핸드(6)를 제공한다.