Sliding door for inline test chamber and test system for semiconductor comprising the same

The present invention relates to a sliding door of a continuous process test chamber and a semiconductor test system including the same. The sliding door can be used in in-line thermal shock test chambers for semiconductor chips operating at different temperatures, and is arranged to open or close t...

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Bibliographic Details
Main Author JEON MIN HO
Format Patent
LanguageEnglish
Korean
Published 01.06.2023
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:The present invention relates to a sliding door of a continuous process test chamber and a semiconductor test system including the same. The sliding door can be used in in-line thermal shock test chambers for semiconductor chips operating at different temperatures, and is arranged to open or close the outlet and inlet of the test chambers together in the test mode of the board rack containing the semiconductor chip or the transfer mode of the board rack between adjacent test chambers. 본 발명은 서로 다른 온도로 작동하는 반도체 칩의 열충격 테스트 챔버들을 인라인(In-line)화 할 수 있고, 반도체 칩이 수용된 보드 랙의 테스트 모드 또는 인접하는 테스트 챔버 간 보드 랙의 이송 모드에서 테스트 챔버들의 배출구 및 투입구를 함께 개방하거나 닫히도록 마련된 연속 공정형 테스트 챔버의 슬라이딩 도어 및 이를 포함하는 반도체 테스트 시스템에 관한 것이다.
Bibliography:Application Number: KR20220160134