FOREIGN SUBSTANCE INSPECTION APPARATUS EXPOSURE APPARATUS AND ARTICLE MANUFACTURING METHOD

• Main Author: MAEDA KOHEI
• Format: Patent
• Language: English; Korean
• Published: 17.05.2023
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MATERIALS THEREFOR; MEASURING; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; TESTING

A foreign substance device for detecting whether a foreign substance exists in an inspection area of an object to be inspected comprises: a light reception unit receiving scattering light from the foreign substance by illuminating the foreign substance by the light from a light source; and a determi...