SEALING STRUCTURE AND DEVICE FOR CONTAINING MATERIALS COMPRISING THE SAME
The present invention relates to a sealing structure and a substrate holding apparatus including the same. The sealing structure according to one embodiment may comprise: a lid including the first lid face, the second lid surface opposite to the first lid surface, and a brittle region between the fi...
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Main Authors | , , , , , , , , , , , , , , , , , , , , , , |
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Format | Patent |
Language | English Korean |
Published |
27.03.2023
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Subjects | |
Online Access | Get full text |
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