SEALING STRUCTURE AND DEVICE FOR CONTAINING MATERIALS COMPRISING THE SAME

The present invention relates to a sealing structure and a substrate holding apparatus including the same. The sealing structure according to one embodiment may comprise: a lid including the first lid face, the second lid surface opposite to the first lid surface, and a brittle region between the fi...

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Bibliographic Details
Main Authors OH, WON SEOK, KWON, HYUK JU, CHOI, BYUNG KWON, JANG, JUN WON, HA, TAE SIN, CHO, JOON KEE, KIM, GA HEE, KWON, YOUNG CHUN, CHOI, WON JE, HEO, DAL, SEO, HYUNG TAE, PARK, MIN SIK, LEE, DONG SEON, KIM, JIN WOO, LEE, SANG YUN, CHOI, HYUN DO, PARK, YOUNG JIN, KIM, JEONG HUN, CHOI, YOUN SUK, HONG, WOO RAM, CHANG, JAE JUN, KIM, BO SUNG, JEON, HYUN JEONG
Format Patent
LanguageEnglish
Korean
Published 27.03.2023
Subjects
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