SUBSTRATE FIXING DEVICE

• Main Authors: KINOSHITA YUSUKE, NAKAMURA YUICHI, OGURO HIROKI
• Format: Patent
• Language: English; Korean
• Published: 06.03.2023
• Subjects: BASIC ELECTRIC ELEMENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; TRANSPORTING

Provided is a substrate fixing device capable of suppressing discharge even when an electrostatic adsorption member is thin. A substrate fixing device of the present disclosure includes: a base plate having a through hole formed therein; an electrode pin inserted into the through hole and penetratin...