COMPOSITION FOR REMOVING EDGE BEAD FROM METAL CONTAINING RESISTS AND METHOD OF FORMING PATTERNS INCOUDING STEP OF REMOVING EDGE BEAD USING THE COMPOSITION

• Main Authors: HEO RYUNMIN, HAN DASOM, KIM MINSOO, LEE MINYOUNG, KIM JAEHYUN, LEE DONGHYUNG, MOON HYUNGRANG, KU JAMIN
• Format: Patent
• Language: English; Korean
• Published: 17.02.2023
• Subjects: ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES; APPARATUS SPECIALLY ADAPTED THEREFOR; CANDLES; CHEMISTRY; CINEMATOGRAPHY; DETERGENT COMPOSITIONS; DETERGENTS; ELECTROGRAPHY; FATTY ACIDS THEREFROM; HOLOGRAPHY; MATERIALS THEREFOR; METALLURGY; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; RECOVERY OF GLYCEROL; RESIN SOAPS; SOAP OR SOAP-MAKING; USE OF SINGLE SUBSTANCES AS DETERGENTS

유기 용매, 그리고 AlogP3가 30 Å2 이상인 화합물을 포함하는, 금속 함유 레지스트의 에지 비드 제거용 조성물, 및 이를 이용한 에지 비드 제거 단계를 포함하는 패턴 형성 방법을 제공한다.