APPARATUS FOR MANUFACTURING MASK

• Main Authors: JO EUNBEE, HWANG KYU HWAN, KIM HWI, PARK SANGHA, KIM JEONGKUK, NAM KANGHYUN, HONG JAEMIN, JIN SEUNGMIN, LEE AREUM
• Format: Patent
• Language: English; Korean
• Published: 15.02.2023
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

A mask manufacturing device of one embodiment of the present invention may comprise: a stage that supports a target mask; and a light irradiation part disposed on the stage and irradiating a laser to the target mask. The target mask may comprise: a target mask sheet comprising a front surface and a...