챔버 배기장치 세정을 위한 세정 유닛

• Main Authors: NGUYEN HANH, CHAN KELVIN, CHUA THAI CHENG, KRAUS PHILIP ALLAN, SUBRAMANI ANANTHA
• Format: Patent
• Language: Korean
• Published: 09.02.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; CLEANING; CLEANING IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PERFORMING OPERATIONS; PREVENTION OF FOULING IN GENERAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING

본 명세서에 개시된 실시예들은 챔버(chamber)의 배기 라인(line)을 위한 세정 모듈(module)을 포함한다. 실시예에서, 이동식 세정 모듈은 챔버를 포함하고, 여기서 챔버는 제1 개구 및 제2 개구를 포함한다. 실시예에서, 세정 모듈은 제1 개구를 밀봉하기 위한 리드(lid)를 더 포함한다. 실시예에서, 리드는 유전체 플레이트(plate), 유전체 플레이트에 결합된 유전체 공진기, 유전체 공진기 내부의 구멍에 포지셔닝(position)된 모노폴 안테나(monopole antenna), 및 유전체 공진기를 둘러싸는 전도성 층을 포함한다. Embodiments disclosed herein include a cleaning module for the exhaust line of a chamber. In an embodiment, a mobile cleaning module comprises a chamber where the chamber comprises a first opening and a second opening. In an embodiment, the cleaning module further comprises a lid to seal the first opening. In an embodiment, the lid comprises a dielectric plate, a dielectric resonator coupled to the dielectric plate, a monopole antenna positioned in a hole into the dielectric resonator, and a conductive layer surrounding the dielectric resonator.