Wafer transportation system and method of manufacturing semiconductor device using the same

• Main Authors: LEE SANG KYUNG, LEE MIN KYUN, LIM JEONG HUN, CHO KYU BUM, AHN YONG JUN, LEE HYUN WOO, CHANG JUN HYUK, KIM YOUNG WOOK
• Format: Patent
• Language: English; Korean
• Published: 26.01.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTINGELECTRIC POWER; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES; MEASURING; PHYSICS; SEMICONDUCTOR DEVICES; SYSTEMS FOR STORING ELECTRIC ENERGY; TESTING

According to the technical idea of the present invention, a wafer transportation system is provided. The wafer transportation system includes: a front opening unified pod configured to load any one of a wafer and a sensing device for inspecting the wafer; an OHT configured to transport the front opening unified pod; a wafer storage device including a charging part configured to charge the sensing device and configured to load one of the wafer and the sensing device; and a control part configured to control the operation of the charging part and the OHT. 본 발명의 기술적 사상은 웨이퍼 및 상기 웨이퍼를 검사하기 위한 감지 장치 중 어느 하나를 로딩하도록 구성된 전방 개방 통합 포드(Front Opening Unified Pod); 상기 전방 개방 통합 포드를 이송하도록 구성된 OHT; 상기 감지 장치를 충전하도록 구성된 충전부를 포함하며, 상기 웨이퍼 및 상기 감지 장치 중 어느 하나를 로딩하도록 구성된 웨이퍼 저장 장치; 및 상기 충전부 및 상기 OHT의 동작을 제어하도록 구성된 제어부;를 포함하는 것을 특징으로 하는 웨이퍼 이송 시스템을 제공한다.