COMPOSITION FOR REMOVING EDGE BEAD FROM METAL CONTAINING RESISTS AND METHOD OF FORMING PATTERNS INCOUDING STEP OF REMOVING EDGE BEAD USING THE COMPOSITION

• Main Authors: WOO CHANGSOO, HEO RYUNMIN, KIM MINSOO, LEE MINYOUNG, KIM YOUNGKWON, KIM JAEHYUN, MOON HYUNGRANG
• Format: Patent
• Language: English; Korean
• Published: 17.01.2023
• Subjects: ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES; APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CANDLES; CHEMISTRY; CINEMATOGRAPHY; DETERGENT COMPOSITIONS; DETERGENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; FATTY ACIDS THEREFROM; HOLOGRAPHY; MATERIALS THEREFOR; METALLURGY; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; RECOVERY OF GLYCEROL; RESIN SOAPS; SEMICONDUCTOR DEVICES; SOAP OR SOAP-MAKING; USE OF SINGLE SUBSTANCES AS DETERGENTS

Provided are: a composition for removing an edge bead of a metal-containing resist, comprising an organic solvent and a cyclic compound substituted with at least one hydroxyl group (-OH), wherein the number of carbon atoms of the cyclic compound is 5 to 30, and the cyclic compound has at least one double bond in the ring; and a method for forming a pattern, comprising a step of removing the edge bead by using same. 유기 용매, 그리고 적어도 하나의 하이드록시기 (-OH)로 치환된, 고리형 화합물을 포함하고, 상기 고리형 화합물의 탄소수는 5 내지 30이며, 상기 고리형 화합물은 고리 내에 적어도 1개의 이중 결합을 갖는 것인, 금속 함유 레지스트의 에지 비드 제거용 조성물, 및 이를 이용한 에지 비드 제거 단계를 포함하는 패턴 형성 방법을 제공한다.