SUBSTRATE CONTAINER SYSTEM

• Main Authors: CHIU MING CHIEN, HSIA HAO KANG, LEE KUO HUA, CHUANG CHIA HO, LIN SHU HUNG
• Format: Patent
• Language: English; Korean
• Published: 09.01.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A substrate container system includes a container body, a filter assembly, and a rear-surface cover. The container body includes an upper end surface, a bottom surface facing the upper end surface, and a back plate connecting the upper end surface and the bottom surface. The container body has a fro...