FILM FORMING APPARATUS FILM FORMING METHOD AND EVAPORATION SOURCE UNIT

• Main Authors: YAMADA MIYU, KAZAMA YOSHIAKI
• Format: Patent
• Language: English; Korean
• Published: 06.01.2023
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The purpose of the present invention is to suppress the enlargement of a film forming apparatus. A film forming apparatus comprises a film forming unit for forming a film on a substrate moving relatively in a movement direction. The film forming unit includes: a plurality of evaporation sources each having a heating means and an independent material container and emitting deposited materials; and a plurality of monitoring means for monitoring the state of the emission of the deposited materials from the plurality of evaporation sources, respectively. The plurality of evaporation sources includes a first evaporation source and a second evaporation source, which are arranged in a first direction intersecting with the movement direction. The plurality of monitoring means includes a first monitoring means and a second monitoring means, which are arranged in a second direction intersecting with the first direction. The first monitoring means monitors the state of the emission of the deposited materials from the first evaporation source, and the second monitoring means monitors the state of the emission of the deposited materials from the second evaporation source. [과제] 성막 장치의 대형화를 억제하는 것이다. [해결 수단] 성막 장치는, 이동 방향으로 상대적으로 이동하는 기판에 대해 성막하는 성막 유닛을 구비한다. 성막 유닛은, 각각이 가열 수단과 독립된 재료 용기를 갖고, 증착 물질을 방출하는 복수의 증발원과, 복수의 증발원으로부터의 증착 물질의 방출 상태를 각각 감시하는 복수의 감시 수단을 포함한다. 복수의 증발원은, 이동 방향에 교차하는 제1 방향으로 배열된 제1 증발원 및 제2 증발원을 포함한다. 복수의 감시 수단은, 제1 방향에 교차하는 제2 방향으로 배열된 제1 감시 수단 및 제2 감시 수단을 포함한다. 제1 감시 수단은 제1 증발원으로부터의 증착 물질의 방출 상태를 감시하고, 제2 감시 수단은 제2 증발원으로부터의 증착 물질의 방출 상태를 감시한다.