MASK AND MANUFACTUREING METHOD FOR THE SAME

• Main Authors: KIM HWI, HWANG KYU HWAN, KIM JEONGKUK, LEE AREUM
• Format: Patent
• Language: English; Korean
• Published: 22.12.2022
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The mask of one embodiment includes a mask sheet having an opening part penetrating between an upper surface and a lower surface, and a mask frame supporting the mask sheet. The mask sheet includes a protrusion part adjacent to the opening and protruding from the lower surface; and a concave part adjacent to the protrusion part and recessed in a direction from the lower surface. Thus, the precision and reliability of a deposition region can be improved. 일 실시예의 마스크는 상면과 상기 하면 사이를 관통하는 개구부가 정의된 마스크 시트, 및 마스크 시트를 지지하는 마스크 프레임을 포함하고, 마스크 시트는 개구부에 인접하며 하면으로부터 돌출된 돌출부, 및 돌출부에 인접하고 하면에서 상기 방향으로 함몰된 오목부를 포함하여 증착 영역의 정밀도 및 신뢰도를 개선할 수 있다.