METHOD OF SYNTHESIZING ORGANOMETALLIC COMPOUND AND METHOD FOR THE FORMATION OF THIN FILMS USING THEREOF

• Main Authors: PARK MI RA, PARK JUNG WOO, SEOK JANG HYEON, LEE HYUN KYUNG
• Format: Patent
• Language: English; Korean
• Published: 13.12.2022
• Subjects: ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; ORGANIC CHEMISTRY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The present invention relates to a method for manufacturing an organometallic compound (particularly, an organometallic compound including rare earth metal) and a method for forming a thin film having excellent characteristics by depositing the manufactured organometallic compound. The method comprises a step of synthesizing a compound of formula 3 by reacting a compound of formula 1: ML_3 with a compound of formula 2. 본 발명은 유기 금속 화합물(특히, 희토류 금속을 포함하는 유기 금속 화합물)의 제조방법 및 제조된 유기 금속 화합물을 증착하여 우수한 특성의 박막을 제조하는 방법에 관한 것이다.