스퍼터링 타겟재의 제조 방법

• Main Author: MATSUBARA NORIAKI
• Format: Patent
• Language: Korean
• Published: 13.09.2022
• Subjects: ALLOYS; CASTING; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; FERROUS OR NON-FERROUS ALLOYS; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MAKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; METALLURGY; PERFORMING OPERATIONS; POWDER METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING; TREATMENT OF ALLOYS OR NON-FERROUS METALS; WORKING METALLIC POWDER

본 발명은, 스퍼터링 시의 파티클 발생이 저감된 타겟재의 제조 방법을 제공하는 것을 목적으로 하고, 그 재질이 합금 M인 스퍼터링 타겟재의 제조 방법으로서, 제1 분말과 제2 분말을 혼합하여 얻어지는 혼합 분말을 소결하는 소결 공정을 포함하고, 제1 분말의 재질이, B 함량 비율이 40at.% 이상 60at.% 이하인 합금 M1 이고, 제2 분말의 재질이, B 함량 비율이 20at.% 이상 35at.% 이하인 합금 M2이며, 혼합 분말에 있어서의 B 함량 비율이 33at.% 이상 50at.% 이하이고, 소결 공정에 있어서, (CoFe)2B상과 (CoFe)B상을 포함하는 금속 조직이 형성되고, 주사형 전자현미경을 사용하여, (CoFe)2B상과 (CoFe)B상의 경계 길이를 측정하여 얻어지는, 단위면적당의 경계 길이 Y(1/㎛)와, 합금 M의 B 함량 비율 X(at.%)가, 하기 식을 만족시키는, 스퍼터링 타겟재의 제조 방법을 제공한다. Y <-0.0015×(X-42.5)2+0.15 An object of the present invention is to provide a method of producing a target material with reduced particle generation during sputtering, which is a method of producing a sputtering target material whose material is an alloy M, including a sintering step of sintering a mixed powder obtained by mixing a first powder and a second powder, wherein a material of the first powder is an alloy M1 in which the proportion of a B content is from 40 at.% to 60 at.%, wherein a material of the second powder is an alloy M2 in which the proportion of a B content is from 20 at.% to 35 at.%, wherein the proportion of a B content in the mixed powder is from 33 at.% to 50 at.%, wherein a metallographic structure including a (CoFe)2B phase and a (CoFe)B phase is formed in the sintering step, and wherein a boundary length per unit area Y (1/µm), which is obtained by measuring a boundary length between the (CoFe)2B phase and the (CoFe)B phase using a scanning electron microscope, and a proportion X (at.%) of a B content of the alloy M satisfy the following expression: Y<−0.0015×X−42.52+0.15.