TMD MEMS MEMS DEVICE WITH A TMD STRUCTURE

• Main Authors: FUELDNER MARC, STRAEUSSNIGG DIETMAR, ONARAN ABIDIN GUECLUE
• Format: Patent
• Language: English; Korean
• Published: 08.09.2022
• Subjects: DEAF-AID SETS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PUBLIC ADDRESS SYSTEMS; TRANSPORTING

A MEMS device (10) includes suspension electrode structures (12, 13) anchored to a substrate (14), and a tuned mass damping (TMD) structure (16). The MEMS device (10) has a MEMS resonance mode, wherein portions of the suspension electrode structures (12, 13) are arranged to form a TMD structure (16) having a TMD mass element (16-1) and a TMD spring element (16-2) to provide a TMD resonance mode that cancels the MEMS resonance mode. MEMS 디바이스(10)는 기판(14)에 앵커링된 현수 전극 구조체(12; 13) 및 TMD(튜닝 매스 댐핑) 구조체(16)를 포함하고, MEMS 디바이스(10)는 MEMS 공진 모드를 갖고, 여기서, 현수 전극 구조체(12; 13)의 부분은 MEMS 공진 모드를 상쇄하는 TMD 공진 모드를 제공하기 위해 TMD 매스 요소(16-1) 및 TMD 스프링 요소(16-2)를 갖는 TMD 구조체(16)를 형성하도록 배열된다.