ELECTRON MICROSCOPE

The present invention relates to an electron microscope, wherein according to one aspect of the present invention, the present invention may provide the electron microscope comprising: an electron gun that emits an electron beam; a diffraction member comprising an edge part that irradiates the elect...

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Bibliographic Details
Main Authors JU JINSIK, LEE SEUNGHYUN, LEE HYERI, KIM YUJONG, KIM CHIHYUNG, PIKAD BUAPHAD
Format Patent
LanguageEnglish
Korean
Published 11.08.2022
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:The present invention relates to an electron microscope, wherein according to one aspect of the present invention, the present invention may provide the electron microscope comprising: an electron gun that emits an electron beam; a diffraction member comprising an edge part that irradiates the electron beam emitted from the electron gun, and diffracts the irradiated electron beam; one or more lenses that enlarge an image generated by the electron beam diffracted by the diffraction member to the electron beam irradiated and passed through the sample; and a detector that detects the image magnified by the one or more lenses. Therefore, the present invention is capable of having an effect of significantly reducing costs. 본 발명은 전자 현미경에 관한 것으로, 본 발명의 일 측면에 따르면, 전자빔을 방출하는 전자총; 상기 전자총에서 방출된 전자빔이 조사되고, 조사된 전자빔을 회절시키는 가장자리부를 포함하는 회절부재; 상기 회절부재에서 회절된 전자빔이 조사되어 샘플을 통과한 전자빔에 의해 생성된 이미지를 확대하는 하나 이상의 렌즈; 및 상기 하나 이상의 렌즈에서 확대된 이미지를 검출하는 디텍터를 포함하는, 전자 현미경이 제공될 수 있다.
Bibliography:Application Number: KR20210015849