초음파 센서용 멤브레인의 제조 방법 및 초음파 트랜스듀서용 멤브레인

• Main Authors: LIEBELT TOBIAS, JUNKER MARKUS, NEUGEBAUER EVA MARIA, BOETTICHER STEFANIE
• Format: Patent
• Language: Korean
• Published: 09.08.2022
• Subjects: ACOUSTICS; ACOUSTICS NOT OTHERWISE PROVIDED FOR; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; CHEMICAL SURFACE TREATMENT; CHEMISTRY; CLEANING OR DEGREASING OF METALLIC MATERIAL BY CHEMICALMETHODS OTHER THAN ELECTROLYSIS; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING,NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; MUSICAL INSTRUMENTS; PERFORMING OPERATIONS; PHYSICS; PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; SOUND-PRODUCING DEVICES; SPRAYING OR ATOMISING IN GENERAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING

본 발명은 초음파 센서용 멤브레인(101a)의 제조 방법에 관한 것이다. 이 방법에서는 먼저 금속재로 형성된 멤브레인 본체(100)가 제공된다. 그 다음, 멤브레인 본체(100)의 외표면 영역(106)이 탈지(degreasing)된다. 이어서 멤브레인 본체(100)의 외표면 영역(106)이 산세(pickling)된다. 나아가, 후속하여 도포되는 제2 패시베이션 층(110)의 예비 활성화(preactivation)를 위해, 외표면 영역(106) 위에 제1 층으로서 제1 패시베이션 층(105)이 증착된다. A method for producing a diaphragm for an ultrasonic sensor. In the method, a diaphragm body made of metal material is first provided. Next, an external surface region of the diaphragm body is degreased. The external surface region of the diaphragm body is then pickled. To pre-activate the subsequently applied second passivation layer, a first passivation layer is also deposited on the external surface region as a first layer.