석영 유리 도가니 및 그 제조 방법

• Main Authors: KISHI HIROSHI, OHARA MASAMI, KITAHARA ERIKO
• Format: Patent
• Language: Korean
• Published: 02.08.2022
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; CHEMISTRY; CRYSTAL GROWTH; GLASS; MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES; METALLURGY; MINERAL OR SLAG WOOL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL

[과제] 브라운 링의 박리를 억제하여 실리콘 단결정의 수율을 높이는 것이 가능한 석영 유리 도가니 및 그 제조 방법을 제공한다. [해결 수단] 본 발명에 따른 석영 유리 도가니(1)는 Na, K, Ca의 합계 농도의 내표면(10i)으로부터의 깊이 방향의 분포의 피크가 내표면(10i)보다 깊은 위치에 존재한다. A quartz glass crucible (1) has a structure wherein a peak of a distribution of a total concentration of Na, K, and Ca in a depth direction from an inner surface (10i) of the crucible is present at a position deeper than the inner surface (10i). In an exemplary embodiment, the quartz glass crucible is capable of improving the yield of a silicon single crystal by suppressing peeling-off of brown rings.