EXHAUST PUMP FAILURE PREDICTION METHOD AND PUMP FAILURE PREDICTION SYSTEM

• Main Authors: BAE JONG YONG, MAENG SEO YOUNG, GIM SU JI, KIM SANG BUM, ROH YOUNG SEOK, PYEON JUNG JOON, LEE EUN SUNG
• Format: Patent
• Language: English; Korean
• Published: 15.07.2022
• Subjects: ALARM SYSTEMS; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS; BLASTING; DETECTING MASSES OR OBJECTS; GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; HEATING; LIGHTING; MEASURING; MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR; MECHANICAL ENGINEERING; ORDER TELEGRAPHS; PHYSICS; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS; SIGNALLING; SIGNALLING OR CALLING SYSTEMS; TARIFF METERING APPARATUS; TESTING; WEAPONS

The present invention relates to a method for predicting a failure of an exhaust pump and a system for predicting the failure of a pump. A purpose of the present invention is to provide a system for predicting the failure of a pump, capable of predicting the failure of an exhaust pump by comprehensively considering not only the temperature and pressure of the exhaust pump but also various conditions, such as the state of an exhaust gas trap device, the state of a third exhaust line, and the state of an exhaust gas scrubber. According to embodiments of the present invention to achieve the purpose of the present invention, the system for predicting a failure of a pump includes: an evaporation chamber; the exhaust gas trap device connected to the evaporation chamber by a first exhaust line, and collecting residues included in the gas discharged from the evaporation chamber; an exhaust pump connected to the exhaust gas trap device by a second exhaust line, and providing fluid pressure for moving the residues; and a monitoring device including a sensor unit and a control unit for generating a warning signal when it is determined that there is a possibility that a failure situation occurs by comparing collected data obtained by the sensor unit to stored data including data about an open form and the thickness of the residues piled in the third exhaust line. The sensor unit includes: the exhaust gas scrubber connected to the exhaust pump by a third exhaust line to process the residues; a trap device sensor for measuring the pressure of the exhaust gas trap device; and a pump sensor for measuring the temperature and the pressure of the exhaust pump. 상기 본 발명의 일 과제를 달성하기 위한 예시적인 실시예들에 따른 펌프 고장 예측 시스템은, 증착 챔버, 상기 증착 챔버와 제1 배기 라인에 의해 연결되며 상기 증착 챔버로부터 배출된 가스에 포함된 잔여물을 포집하기 위한 배기가스 트랩 장치, 상기 배기가스 트랩 장치와 제2 배기 라인으로 연결되어 상기 잔여물의 이동을 위한 유압을 제공하는 배기 펌프, 상기 배기 펌프와 제3 배기 라인으로 연결되어 상기 잔여물을 처리하기 위한 배기가스 스크러버 및 상기 배기가스 트랩 장치의 압력을 측정하기 위한 트랩 장치 센서 및 상기 배기 펌프의 온도 및 압력을 측정하기 위한 펌프 센서를 포함하는 센서부, 및 상기 센서부에 의해 획득된 수집 데이터와 상기 제3 배기 라인 내부에 쌓인 침전물의 두께 및 개형에 대한 데이터를 포함하는 저장 데이터를 비교하여 고장 상황이 발생될 가능성이 있다고 판단하는 경우 경고 신호를 발생시키기 위한 제어부를 구비하는 모니터링 장치를 포함한다.