SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD OF THE SAME

A semiconductor structure and a manufacturing method thereof are provided. The semiconductor structure includes: a substrate; a membrane bridge that defines a plurality of cavities together with the substrate, has the same crystalline structure as the substrate, and has a constant upper surface heig...

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Main Authors OH JE HONG, LEE SEUNG MIN, RYU JUNG EL, JANG HO WON, HWANG, KYUNG WOOK, HWANG, JUN SIK
Format Patent
LanguageEnglish
Korean
Published 12.07.2022
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A semiconductor structure and a manufacturing method thereof are provided. The semiconductor structure includes: a substrate; a membrane bridge that defines a plurality of cavities together with the substrate, has the same crystalline structure as the substrate, and has a constant upper surface height relative to the substrate; and a nitride semiconductor layer disposed on the membrane bridge. 반도체 구조체 및 그 제조 방법을 제공한다. 본 반도체 구조체는, 기판, 기판과 함께 복수 개의 캐비티를 정의하고 기판과 동일한 결정 구조를 가지며 상부 표면의 높이가 기판에 대해 일정한 멤브레인 브릿지 및 멤브레인 브릿지상에 배치된 질화물 반도체층을 포함한다.
Bibliography:Application Number: KR20210029053