MEMS SIGNAL PROCESSING CIRCUIT FOR TRIPLE-MEMBRANE MEMS DEVICE

• Main Authors: FUELDNER MARC, WIESBAUER ANDREAS, KOLLIAS ATHANASIOS
• Format: Patent
• Language: English; Korean
• Published: 28.06.2022
• Subjects: DEAF-AID SETS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS; PUBLIC ADDRESS SYSTEMS

삼중막 MEMS 디바이스는 서로 이격되는 제1 막, 제2 막, 및 제3 막 - 제2 막은 제1 막과 제3 막 사이에 있음 -, 제1 막과 제3 막 사이의 밀봉된 저압 챔버, 밀봉된 저압 챔버에서의 제1 스테이터 및 제2 스테이터, 및 삼중막 MEMS 디바이스의 출력 신호들을 판독하도록 구성된 신호 프로세싱 회로를 포함한다. A triple-membrane MEMS device includes a first membrane, a second membrane and a third membrane spaced apart from one another, wherein the second membrane is between the first membrane and the third membrane, a sealed low pressure chamber between the first membrane and the third membrane, a first stator and a second stator in the sealed low pressure chamber, and a signal processing circuit configured to read-out output signals of the triple-membrane MEMS device.