MEMS TRIPLE-MEMBRANE MEMS DEVICE

• Main Authors: FUELDNER MARC, WIESBAUER ANDREAS, KOLLIAS ATHANASIOS
• Format: Patent
• Language: English; Korean
• Published: 28.06.2022
• Subjects: DEAF-AID SETS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PUBLIC ADDRESS SYSTEMS; TRANSPORTING

삼중 멤브레인 MEMS 디바이스 시스템은, 서로 이격된 제1 멤브레인, 제2 멤브레인, 및 제3 멤브레인 - 제2 멤브레인은 제1 멤브레인과 제3 멤브레인 사이에 있고, 제2 멤브레인은 복수의 개구를 포함함 -, 제1 멤브레인과 제3 멤브레인 사이의 밀봉 저압 챔버, 및 밀봉 저압 챔버 내의 복수의 전극을 포함한다. A system includes a first membrane (112), a second membrane (114) and a third membrane (116) spaced apart from one another, wherein the second membrane (114) is between the first membrane (112) and the third membrane (116), and the second membrane (114) comprises a plurality of openings (302), a sealed low pressure chamber between the first membrane (112) and the third membrane (116), and a plurality of electrodes (132, 136) in the sealed low pressure chamber.