TRANSPARENT STACKED ELECTRODES OF GALLIUM OXIDE AND SILVER NANOWIRE MANUFACTURING METHOD THEREOF AND MANUFACTURING APPARATUS THEREOF

• Main Authors: SEO DONG HYUN, CHO SEONG HO, LEE, MYUNG HYUN, JEONG SEONG MIN, SHIN YUN JI, BAE SI YOUNG
• Format: Patent
• Language: English; Korean
• Published: 27.05.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The present invention relates to a multilayer transparent electrode of gallium oxide and silver nanowires, a manufacturing method thereof and a manufacturing apparatus thereof. According to the present invention, the multilayer transparent electrode of gallium oxide and silver nanowires comprises: a first UV transmissive layer made of gallium oxide; a conductive layer disposed on the first UV transmissive layer and including silver nanowires; and a second UV transmissive layer formed on the conductive layer and made of gallium oxide. 본 발명은 산화 갈륨 및 은 나노와이어의 적층 투명전극, 이의 제조방법 및 제조장치에 관한 것으로서, 본 발명의 산화 갈륨 및 은 나노와이어의 적층 투명전극은 산화 갈륨으로 이루어진 제1 UV 투과층, 상기 제1 UV 투과층 상에 배치되고, 은 나노와이어를 포함하는 도전층, 및 상기 도전층 상에 형성되고, 상기 산화 갈륨으로 이루어진 제2 UV 투과층을 포함한다.