Apparatus for collecting by-product and method for collecting by-product

• Main Authors: JEON IL JUN, BAE JONG YONG, MAENG SEO YOUNG, GIM SU JI, ROH YOUNG SEOK, PYEON JUNG JOON
• Format: Patent
• Language: English; Korean
• Published: 18.05.2022
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

According to an embodiment of the present invention, a byproduct collection device comprises: a chamber having a gas inlet, a gas outlet, and an inner space; a heater disposed on a gas inlet side of the inner space of the chamber and varying heating temperature in time series; a vortex forming member disposed near the heater; a plurality of first collection members disposed in a lower portion of the heater; a plurality of second collection members arranged to cross each other in a lower portion of the first collection members; and a third collection member disposed on a gas outlet side of the inner space of the chamber. 본 발명의 실시예에 따른 부산물 포집 장치는 가스 유입구와 가스 유출구가 구비되며 내부 공간을 가지는 챔버와, 상기 챔버의 내부 공간 중 상기 가스 유입구 측에 배치되며 시계열적으로 가열 온도를 가변하는 히터와, 상기 히터의 주위에 배치되는 와류형성부재와, 상기 히터의 하부에 배치되는 복수개의 제1 포집부재와, 상기 제1 포집부재의 하부에 복수개가 상호 교차되도록 배치되는 제2 포집부재 및 상기 챔버의 내부 공간 중 상기 가스 유출구 측에 배치되는 제3 포집부재를 포함한다.