METHOD FOR CORRECTING TRANSFER POSITION DATA

In accordance with an objective of the present invention, provided is technology capable of suppressing the placement of a measurer on an edge ring. To achieve the objective, in accordance with an embodiment, a carrying position data correction method includes a step of correcting carrying position...

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Bibliographic Details
Main Authors YOKOYAMA KIMIHIRO, HATANAKA TAKAYUKI
Format Patent
LanguageEnglish
Korean
Published 29.04.2022
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:In accordance with an objective of the present invention, provided is technology capable of suppressing the placement of a measurer on an edge ring. To achieve the objective, in accordance with an embodiment, a carrying position data correction method includes a step of correcting carrying position data in a treatment system using a measurer. The system includes a carrier carrying a workpiece onto an electrostatic chuck of which the circumference is surrounded by the edge ring. The electrostatic chuck includes a circular disc-shaped body, and a circular disc-shaped electrode provided in the body, and having a smaller than the body. The measurer includes a base substrate, a plurality of sensor electrodes, a high-frequency oscillator, and an operation part. The base substrate manifests a circular disc shape having a smaller diameter than the electrostatic chuck. (과제) 에지 링에의 측정기의 얹힘을 억제하는 기술을 제공한다. (해결 수단) 예시적 실시 형태에 따른 반송 위치 데이터의 교정 방법은, 측정기를 이용하여 처리 시스템에 있어서의 반송 위치 데이터를 교정한다. 처리 시스템은, 반송 위치 데이터에 근거하여, 에지 링에 의해서 주위가 둘러싸인 정전 척 상에 피가공물을 반송하는 반송 장치를 구비한다. 정전 척은, 원반 형상의 본체와, 본체 내에 마련되고, 본체보다 작은 직경을 가지는 원반 형상의 전극을 포함한다. 측정기는, 베이스 기판과, 복수의 센서 전극과, 고주파 발진기와, 연산부를 포함한다. 베이스 기판은, 정전 척보다 작은 직경을 가지는 원반 형상을 나타낸다.
Bibliography:Application Number: KR20210134581