BOAT CARRY-IN METHOD AND HEAT TREATMENT APPARATUS

The objective of the present invention is to provide a technique capable of forming a film in a state in which oxidation of an underlying film is suppressed. According to an aspect of the present disclosure, a boat carry-in method is the method of carrying a boat holding a substrate into a processin...

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Bibliographic Details
Main Authors SON SUNG DUK, IKEGAWA HIROAKI, ZOBEL BERNHARD, HISHIYA SHINGO, HEMEL VOLKER
Format Patent
LanguageEnglish
Korean
Published 26.04.2022
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:The objective of the present invention is to provide a technique capable of forming a film in a state in which oxidation of an underlying film is suppressed. According to an aspect of the present disclosure, a boat carry-in method is the method of carrying a boat holding a substrate into a processing container. The method comprises: a step of supplying a reducing gas into the processing container; and a step of carrying the boat into the processing container in a state where the reducing gas exists in the processing container. 본 발명의 과제는 하지막의 산화를 억제한 상태로 성막할 수 있는 기술을 제공하는 것이다. 본 개시의 일 양태에 의한 보트 반입 방법은, 기판을 보유 지지한 보트를 처리 용기 내에 반입하는 방법이며, 상기 처리 용기 내에 환원성 가스를 공급하는 공정과, 상기 처리 용기 내에 상기 환원성 가스가 존재하는 상태로 상기 보트를 상기 처리 용기 내에 반입하는 공정을 갖는다.
Bibliography:Application Number: KR20210132881