ETCHANT COMPOSITION AND MANUFACTURING METHOD OF AN ARRAY SUBSTRATE FOR DISPLAY DEVICE USING THE SAME

The present invention provides an etchant composition comprising ammonium persulfate, a fluorine-containing compound, a chlorine-containing compound, a cyclic amine compound, an inorganic acid, a sulfate, and water, and a method for manufacturing an array substrate for a display device using the sam...

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Bibliographic Details
Main Authors YOON YOUNG JIN, KUK IN SEOL, LEE SUCK JUN, LEE EUN WON, CHO HYEON SU, KIM BEOM SOO
Format Patent
LanguageEnglish
Korean
Published 26.04.2022
Subjects
ADHESIVES
BASIC ELECTRIC ELEMENTS
CHEMISTRY
DYES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE
METALLURGY
MISCELLANEOUS APPLICATIONS OF MATERIALS
MISCELLANEOUS COMPOSITIONS
NATURAL RESINS
PAINTS
POLISHES
SEMICONDUCTOR DEVICES
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Summary:The present invention provides an etchant composition comprising ammonium persulfate, a fluorine-containing compound, a chlorine-containing compound, a cyclic amine compound, an inorganic acid, a sulfate, and water, and a method for manufacturing an array substrate for a display device using the same. According to the present invention, an etching process becomes simple and productivity thereof can be improved. 본 발명은 과산화이황산암모늄, 함불소 화합물, 함염소 화합물, 고리형 아민 화합물, 무기산, 황산염 및 물을 포함하는 식각액 조성물 및 이를 이용한 표시장치용 어레이 기판의 제조방법을 제공한다.
Bibliography:Application Number: KR20200135222